IEEE-NANO 2013 Paper Abstract


Paper WeAS1.2

shen, yajing (Nagoya University), Nakajima, Masahiro (Nagoya University), Yang, Zhan (Nagoya University), Huang, Qiang (Intelligent Robotics Institute, School of Mechatronic Engineerin), Fukuda, Toshio (Nagoya University)

Real-Time Measurement of the Adhesion Force by Hybrid System of ESEM and AFM Cantilever

Scheduled for presentation during the Oral Session "Invited Session: Applications of Micro/Nano Manipulation" (WeAS1), Wednesday, August 7, 2013, 13:18−13:36, Garden Wing Ballroom

13th IEEE International Conference on Nanotechnology, August 5-8, 2013, Shangri-La Hotel, Beijing, China

This information is tentative and subject to change. Compiled on October 15, 2018

Keywords Nanorobotics, Nanosensors and actuators, Nanoassemblies and devices


A hybrid laser sensor and nanorobotic manipulation system was developed inside an environment scanning electron microscope (ESEM). A micro putter was fabricated from an atomic force microscope (AFM) cantilever through focused ion beam (FIB) etching technique. The laser head and the micro putter were assembled and fixed to the nano manipulator inside ESEM chamber. The displacement between the micro putter and the laser head can be measured by the laser sensor system. The relationship of the deflection of the micro putter and the applied force was calibrated by nanorobotic manipulation approach. The single cellís adhesion force to substrate surface was measured based on this hybrid system. The result indicates that both the dynamic data and precise observation can be achieved owing to the combination of the advantages of AFM and ESEM nano robotic manipulation system.



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